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REPORTING YEAR: 1993
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SILICON SYS. INC. 
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Breakdown of releases and waste generation (by chemical) follows:

Chemical Name: HYDROCHLORIC ACID
CAS Number: 007647010             (Name: SILICON SYS. INC.)
Maximum Amount On Site: 1,000 - 9,999 LBS                  (Year: 1993)
Medium        Release (lbs)    Destination or Method Used
------------  --------------   --------------------------
STACK AIR                 24
Total                     24

Generation of production-related waste in lbs  (On=on-site, Off=off-site)-
Year: (*=projected)     1992           1993          1994*          1995*
Rel. or Disp:             12             24              1              1
Treated On:          706,000        385,000        385,000        385,000
Total:               706,012        385,024        385,001        385,001
Non-production-related waste:             0 (accidental or remedial)
Total waste generated       :       385,024 (Production & Non-Production)
Production Ratio:   0.89
    "Rel. or Disp" above = quantity released on-site or disposed off-site

Methods of source reduction used-
W58 OTHER PROCESS MODIFICATIONS

Chemical Name: HYDROGEN FLUORIDE
CAS Number: 007664393             (Name: SILICON SYS. INC.)
Maximum Amount On Site: 100 - 999 LBS                      (Year: 1993)
Medium        Release (lbs)    Destination or Method Used
------------  --------------   --------------------------
STACK AIR                  5
OFF-SITE                 450   TO: SOLVENT SERVICES INC. 
                                   SAN JOSE, CA
                               USING: WASTEWATER TREATMENT (EXCLUDING POTW)   
Total                    455

Generation of production-related waste in lbs  (On=on-site, Off=off-site)-
Year: (*=projected)     1992           1993          1994*          1995*
Rel. or Disp:             15              5             51             51
Treated On:           15,000         11,000         11,000         11,000
Treated Off:              38            450            450            450
Total:                15,053         11,455         11,501         11,501
Non-production-related waste:             0 (accidental or remedial)
Total waste generated       :        11,455 (Production & Non-Production)
Production Ratio:   0.89
    "Rel. or Disp" above = quantity released on-site or disposed off-site

Chemical Name: PHOSPHORIC ACID
CAS Number: 007664382             (Name: SILICON SYS. INC.)
Maximum Amount On Site: 1,000 - 9,999 LBS                  (Year: 1993)
Medium        Release (lbs)    Destination or Method Used
------------  --------------   --------------------------
STACK AIR                  5
Total                      5

Generation of production-related waste in lbs  (On=on-site, Off=off-site)-
Year: (*=projected)     1992           1993          1994*          1995*
Rel. or Disp:              4              5              6              6
Treated On:           25,000         51,000         51,000         51,000
Total:                25,004         51,005         51,006         51,006
Non-production-related waste:             0 (accidental or remedial)
Total waste generated       :        51,005 (Production & Non-Production)
Production Ratio:   0.89
    "Rel. or Disp" above = quantity released on-site or disposed off-site

Chemical Name: SULFURIC ACID
CAS Number: 007664939             (Name: SILICON SYS. INC.)
Maximum Amount On Site: 10,000 - 99,999 LBS                (Year: 1993)
Medium        Release (lbs)    Destination or Method Used
------------  --------------   --------------------------
No releases or transfers reported.

Generation of production-related waste in lbs  (On=on-site, Off=off-site)-
Year: (*=projected)     1992           1993          1994*          1995*
Treated On:          385,000        300,000        300,000        300,000
Treated Off:             926              0              0              0
Total:               385,926        300,000        300,000        300,000
Non-production-related waste:             0 (accidental or remedial)
Total waste generated       :       300,000 (Production & Non-Production)
Production Ratio:   0.89

Totals for all chemicals for SILICON SYS. INC. 
Releases and Transfers (in lbs) -
Stack Air        :             34
Off-site Transfer:            450
Total            :            484                          (Year: 1993)
Amounts of production-related waste generated (in lbs, for current year)-
Released On-site or Disposed Off-site:             34
Treated On-site                      :        747,000
Treated Off-site                     :            450
Total Production-Related Waste       :        747,484
Total Non-Production-Related Waste   :              0
Total Waste Generated                :        747,484

This search was taken from RTK NET's (the Right-To-Know Network)'s copy of EPA's TRIS database. RTK NET is run by OMB Watch and Unison Institute at 1742 Connecticut Ave., NW, Washington DC, 20009 - Phone: 202-234-8494.

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